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The objective of the master of science degree in microelectronic engineering is to provide an opportunity for students to perform graduate-level research as they prepare for entry into either the semiconductor industry or a doctoral program. The degree requires strong preparation in the area of microelectronics and requires a thesis.

Program outcomes

- Understand the fundamental scientific principles governing solid-state devices and their incorporation into modern integrated circuits.

- Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices.

- Develop in-depth knowledge in existing or emerging areas of the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing.

- Apply microelectronic processing techniques to the creation/investigation of new process/device structures.

- Communicate technical material effectively through oral presentations, written reports, and publications.

Plan of study

The MS degree is awarded upon the successful completion of a minimum of 33 semester credit hours, including a 6 credit hour thesis.

The program consists of eight core courses, two graduate electives, 3 credits of graduate seminar and a thesis. The curriculum is designed for students who do not have an undergraduate degree in microelectronic engineering. Students who have an undergraduate degree in microelectronic engineering develop a custom course of study with their graduate adviser.

- Thesis

A thesis is undertaken once the student has completed approximately 20 semester credit hours of study. Planning for the thesis, however, should begin as early as possible. Generally, full-time students should complete their degree requirements, including thesis defense, within two years (four academic semesters and one summer term).


- First Year

Microelectronic Fabrication
Lithographic Materials and Processes
Thin Films
Microelectronics Research Methods
Microelectronic Man.
VLS Process Modeling
Graduate Elective*
Microelectronics Research Methods

- Second Year

Graduate Elective*
MS Thesis
Microelectronics Research Methods

* With adviser approval.
Physical Modeling of Semiconductor Devices

Visit the Microelectronic Engineering MS page on the Rochester Institute of Technology USA website for more details!




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