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Micro Electro Mechanical Systems (MEMS)

Course Description

Course Summary

Electronic technologies have evolved enabling many new device concepts, fabrication methods and characterisation techniques. This has led to the simultaneous fabrication of micro scale mechanical structures with integrated electronics to form MicroElectroMechanical Systems (MEMS). MEMS technology is becoming ubiquitous; it is the key enabling technology that will underpin the internet of things and the proliferation of smart technology in the world around us. You will gain an understanding of the techniques developed by the microelectronics industry to produce micron-scale mechanical devices such as accelerometers and micropumps on silicon wafers. You will work in research laboratories and in the cleanroom.


Semester one: Microfabrication; Introduction to MEMS; Microfluidics and Lab-on-a-Chip; Nanoelectronic Devices; Advanced Memory and Storage; Bionanotechnology

Semester two: MEMS Sensors and Actuators; Practical Application of MEMS; Green Electronics; Nanofabrication and Microscopy; Quantum Devices and Technology; Biosensors; Medical Electrical and Electronic Technologies

Visit our website for further information...

Visit the Micro Electro Mechanical Systems (MEMS) page on the University of Southampton website for more details!

Entry Requirements

First- or upper second-class degree or an equivalent standard in other qualifications approved by the University in an appropriate discipline (e.g. mathematics, physics, engineering). English language: IELTS 6.5, with minimum of 6.0 in each component.

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Recipient: University of Southampton

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