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Microsystems Engineering is one of the most dynamic and interdisciplinary engineering fields. The Master of Science program in Microsystems Engineering (MSE) provides the educational basis for your success in this field. The MSE program is designed for highly qualified graduate students holding a Bachelor degree in engineering or science.

In the first year 12 mandatory courses provide the fundamental theoretical framework for a future career in Microsystems. These courses are designed to provide students with a broad knowledge base in the most important aspects of the field:

• MSE technologies and processes

• Microelectronics

• Micro-mechanics

• MSE design laboratory I

• Optical Microsystems

• Sensors

• Probability and statistics

• Assembly and packaging technology

• Dynamics of MEMS

• Micro-actuators

• Biomedical Microsystems

• Micro-fluidics

• MSE design laboratory II

• Signal processing

As part of the mandatory courses, the Microsystems design laboratory is a two-semester course in which small teams of students undertake a comprehensive, hands-on design project in Microsystems engineering. Requiring students to address all aspects of the generation of a microsystem, from conceptualization, through project planning to fabrication and testing, this course provides an essential glimpse into the workings of engineering projects.

In the second year, MSE students can specialise in two of the following seven concentration areas (elective courses), allowing each student to realize individual interests and to obtain an in-depth look at two sub-disciplines of this very broad, interdisciplinary field:

• Circuits and systems

• Design and simulation

• Life sciences: Biomedical engineering

• Life sciences: Lab-on-a-chip

• Materials

• Photonics

• Process engineering

• Sensors and actuators

Below are some examples of subjects offered in the concentration areas. These subjects do not only include theoretical lectures, but also hands-on courses such as labs, projects and seminars.

Circuits and Systems

• Analog CMOS Circuit Design

• Mixed-Signal CMOS Circuit Design

• VLSI – System Design

• RF- und Microwave Devices and Circuits

• Micro-acoustics

• Radio sensor systems

• Optoelectronic devices

• Reliability Engineering

• Lasers

• Micro-optics

• Advanced topics in Macro-, Micro- and Nano-optics

Design and Simulation

• Topology optimization

• Compact Modelling of large Scale Systems

• Lattice Gas Methods

• Particle Simulation Methods

• VLSI – System Design

• Hardware Development using the finite element method

• Computer-Aided Design

Life Sciences: Biomedical Engineering

• Signal processing and analysis of brain signals

• Neurophysiology I: Measurement and Analysis of Neuronal Activity

• Neurophysiology II: Electrophysiology in Living Brain

• DNA Analytics

• Basics of Electrostimulation

• Implant Manufacturing Techologies

• Biomedical Instrumentation I

• Biomedical Instrumentation II

Life Sciences: Lab-on-a-chip

• DNA Analytics

• Biochip Technologies

• Bio fuel cell

• Micro-fluidics 2: Platforms for Lab-on-a-Chip Applications


• Microstructured polymer components

• Test structures and methods for integrated circuits and microsystems

• Quantum mechanics for Micro- and Macrosystems Engineering

• Microsystems Analytics

• From Microsystems to the nano world

• Techniques for surface modification

• Nanomaterials

• Nanotechnology

• Semiconductor Technology and Devices

MEMS Processing

• Advanced silicon technologies

• Piezoelectric and dielectric transducers

• Nanotechnology

Sensors and Actuators

• Nonlinear optic materials

• CMOS Microsystems

• Quantum mechanics for Micro- and Macrosystems Engineering


• Bionic Sensors

• Micro-actuators

• Energy harvesting

• Electronic signal processing for sensors and actuators

Essential for the successful completion of the Master’s degree is submission of a Master’s thesis, which is based on a project performed during the third and fourth semesters of the program. Each student works as a member of one of the 18 research groups of the department, with full access to laboratory and cleanroom infrastructure.

Visit the Master of Science in Microsystems Engineering page on the University of Freiburg website for more details!





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