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Microsystems Engineering is one of the most dynamic and interdisciplinary engineering fields. The Master of Science program in Microsystems Engineering (MSE) provides the educational basis for your success in this field. Read more
Microsystems Engineering is one of the most dynamic and interdisciplinary engineering fields. The Master of Science program in Microsystems Engineering (MSE) provides the educational basis for your success in this field. The MSE program is designed for highly qualified graduate students holding a Bachelor degree in engineering or science.

In the first year 12 mandatory courses provide the fundamental theoretical framework for a future career in Microsystems. These courses are designed to provide students with a broad knowledge base in the most important aspects of the field:

• MSE technologies and processes
• Microelectronics
• Micro-mechanics
• MSE design laboratory I
• Optical Microsystems
• Sensors
• Probability and statistics
• Assembly and packaging technology
• Dynamics of MEMS
• Micro-actuators
• Biomedical Microsystems
• Micro-fluidics
• MSE design laboratory II
• Signal processing

As part of the mandatory courses, the Microsystems design laboratory is a two-semester course in which small teams of students undertake a comprehensive, hands-on design project in Microsystems engineering. Requiring students to address all aspects of the generation of a microsystem, from conceptualization, through project planning to fabrication and testing, this course provides an essential glimpse into the workings of engineering projects.

In the second year, MSE students can specialise in two of the following seven concentration areas (elective courses), allowing each student to realize individual interests and to obtain an in-depth look at two sub-disciplines of this very broad, interdisciplinary field:

• Circuits and systems
• Design and simulation
• Life sciences: Biomedical engineering
• Life sciences: Lab-on-a-chip
• Materials
• Process engineering
• Sensors and actuators

Below are some examples of subjects offered in the concentration areas. These subjects do not only include theoretical lectures, but also hands-on courses such as labs, projects and seminars.

Circuits and Systems
• Analog CMOS Circuit Design
• Mixed-Signal CMOS Circuit Design
• VLSI – System Design
• RF- und Microwave Devices and Circuits
• Micro-acoustics
• Radio sensor systems
• Optoelectronic devices
• Reliability Engineering
• Lasers
• Micro-optics
• Advanced topics in Macro-, Micro- and Nano-optics

Design and Simulation
• Topology optimization
• Compact Modelling of large Scale Systems
• Lattice Gas Methods
• Particle Simulation Methods
• VLSI – System Design
• Hardware Development using the finite element method
• Computer-Aided Design

Life Sciences: Biomedical Engineering
• Signal processing and analysis of brain signals
• Neurophysiology I: Measurement and Analysis of Neuronal Activity
• Neurophysiology II: Electrophysiology in Living Brain
• DNA Analytics
• Basics of Electrostimulation
• Implant Manufacturing Techologies
• Biomedical Instrumentation I
• Biomedical Instrumentation II

Life Sciences: Lab-on-a-chip
• DNA Analytics
• Biochip Technologies
• Bio fuel cell
• Micro-fluidics 2: Platforms for Lab-on-a-Chip Applications

• Microstructured polymer components
• Test structures and methods for integrated circuits and microsystems
• Quantum mechanics for Micro- and Macrosystems Engineering
• Microsystems Analytics
• From Microsystems to the nano world
• Techniques for surface modification
• Nanomaterials
• Nanotechnology
• Semiconductor Technology and Devices

MEMS Processing
• Advanced silicon technologies
• Piezoelectric and dielectric transducers
• Nanotechnology

Sensors and Actuators
• Nonlinear optic materials
• CMOS Microsystems
• Quantum mechanics for Micro- and Macrosystems Engineering
• Bionic Sensors
• Micro-actuators
• Energy harvesting
• Electronic signal processing for sensors and actuators

Essential for the successful completion of the Master’s degree is submission of a Master’s thesis, which is based on a project performed during the third and fourth semesters of the program. Each student works as a member of one of the 18 research groups of the department, with full access to laboratory and cleanroom infrastructure.

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WHAT YOU WILL GAIN. - Skills and know-how in the latest and developing technologies in safety, risk and reliability. - Practical guidance and feedback from industrial automation experts from around the world. Read more

- Skills and know-how in the latest and developing technologies in safety, risk and reliability
- Practical guidance and feedback from industrial automation experts from around the world
- Live knowledge from the extensive experience of expert instructors
- Credibility and respect as the local safety, risk and reliability expert in your firm
- Global networking contacts in the industry
- Improved career choices and income
- A valuable and accredited Master of Engineering (Safety, Risk and Reliability)** qualification

Next intake is scheduled for June 26, 2017. Applications now open; places are limited.


A powerful force is driving industrial growth and change, and it’s only getting stronger. That force? Uncertainty. Society increasingly demands more efficient transport, more power production, safer energy exploration and processing, less waste, smarter products and of course, all at lower costs. All these demands spotlight uncertainty, and how we need to manage uncertainty through engineering, science and technology. Modern engineers face an intriguing set of challenges when tackling uncertainty and they have developed some of the smartest methods, tools, techniques and approaches for understanding system safety, risk and reliability.

The Master of Engineering (Safety, Risk and Reliability) is the ideal gateway to boost your capacity to tackle these real world increasingly complex issues. In the 21st century, industry will routinely deal with novel hazardous processing technologies, complex energy grid load-balancing from renewables, driverless cars, artificial vision to augment control and feedback in sub-sea exploration – and the infinitesimal scale of nanotechnologies in bionic engineering. Currently, people are at the heart of many hazardous work environments, exposed to the consequences of uncontrolled events; but soon, artificial intelligence will afford more human tasks to be automated (and present a host of newer risks, in exchange for the retired ones). This progress has to be examined in systematic terms – terms that integrate our understandings of technical fallibility, human error and political decision-making.

This program has been carefully designed to accomplish three key goals. First, a set of fundamental concepts is described in useful, manageable ways that encourage rapid and integrated knowledge-acquisition. Second, that knowledge is applied in creative and imaginative ways to afford practical, career-oriented advantages. Third, the learning that results from the integration of knowledge and application is emboldened by activities and projects, culminating in a project thesis that is the capstone of the program. This carefully designed learning journey will develop factual understanding and also exercise participant’s creativity and design-thinking capabilities. Employers are hungry for these skills, and program graduates can expect a significant advantage when interacting with employers, clients, consultants and fellow engineering peers.


To gain entry into this program, applicants need one of the following:
a) a recognized 3-year bachelor degree in an engineering qualification in a congruent* field of practice with relevant work experience**.
b) a 4-year Bachelor of Engineering qualification (or equivalent), that is recognized under the Washington Accord or Engineers Australia, in a congruent*, or a different field of practice at the discretion of the Admissions Committee.
c) a 4-year Bachelor of Engineering qualification (or equivalent) that is not recognized under the Washington Accord, in a congruent* field of practice to this program.

An appropriate level of English Language Proficiency equivalent to an English pass level in an Australian Senior Certificate of Education, or an IELTS score of 6.5 (with no individual band less than 6.0) or equivalent as outlined in the EIT Admissions Policy.

* Congruent field of practice means one of the following with adequate Safety, Risk and Reliability content (fields not listed below to be considered by the Dean and the Admissions committee on a case-by-case basis):
• Chemical and Process Engineering
• Electronic and Communication Systems
• Instrumentation, Control and Automation
• Industrial Automation
• Industrial Engineering
• Agricultural Engineering
• Electrical Engineering
• Manufacturing and Management Systems
• Mechanical and Material Systems
• Mechatronic Systems
• Production Engineering
• Mechanical Engineering
• Robotics

**Substantial industrial experience in a related field is preferred, with a minimum of two years’ relevant experience.


Students must complete 48 credit points comprised of 12 core subjects and one capstone thesis. The thesis is the equivalent of one full semester of work. There are no electives in this course. The program duration is two years full time, or equivalent. Subjects will be delivered over 4 terms per year. Students will take 2 subjects per term and be able to complete 8 units per year. There will be a short break between terms. Each term is 12 weeks long.


During the program you will participate in weekly interactive sessions with the lecturers and other participants from around the world. Each unit's weekly live tutorial will last 60 to 90 minutes. We take student availability into consideration wherever possible before scheduling webinar times. All you need to participate is an adequate Internet connection, speakers and a microphone. The software package and setup details will be sent to you at the start of the program.


EIT provides distance education to students located almost anywhere in the world – it is one of the very few truly global training institutes. Course fees are paid in a currency that is determined by the student’s location. A full list of fees in a currency appropriate for every country would be complex to navigate and, with today’s exchange rate fluctuations, difficult to maintain. Instead we aim to give you a rapid response regarding fees that is customized to your individual circumstances.

We understand that cost is a major consideration before a student commences study. For a rapid reply to your query regarding courses fees and payment options, please query via the below button and we will respond within 2 business days.

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